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发明名称
THIN FILM SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11233776(A)
申请公布日期
1999.08.27
申请号
JP19980027032
申请日期
1998.02.09
申请人
SHARP CORP
发明人
AMANO TORU
分类号
H01L21/336;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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