| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a protection tube into which a temperature measuring part is inserted and extending along an inner surface of a reaction tube from sticking to the inner surface of the reaction tube. <P>SOLUTION: A film formation device includes: a substrate holder holding multiple substrates so that the multiple substrates overlap with each other while being spaced away from each other in a vertical direction; a reaction tube housing the substrate holder; a material gas supply tube supplying a material gas of a thin film formed on the multiple substrate to the multiple substrate held by the substrate holder housed in the reaction tube; a support part supporting the reaction tube; a heating part disposed at the outer side of the reaction tube and heating the multiple substrates; a protection tube fixed to the support part at one end part, extending in the arrangement direction of the multiple substrates at an area between the substrate holder and the reaction tube, and allowing a temperature measuring part to be inserted therein; and a protruding part provided in at least one of an outer surface of the protection tube and an inner surface of the reaction tube and forming a gap between the outer surface of the protection tube and the inner surface of the reaction tube. The above problem is solved by the film formation device. <P>COPYRIGHT: (C)2013,JPO&INPIT |
