| 摘要 |
PURPOSE: A probe apparatus is provided to easily implement the maintenance task within housing by configuring so that a head plate can be extracted and rotated downward. CONSTITUTION: A housing(22) is formed with a groove(26) and a traveling path of concave type. The concave type line of traveling path is used as a line of travel for a stopper pin. A head plate(7) comprises a part of the top plate, and extracts to edge of the housing. A probe card is provided to be attached and detached in the head plate. A maintenance unit(7d) is formed for keeping the probe card within a mounting opening(7a). |
