ANTIMONY AMINO ALKOXIDE COMPOUND AND METHOD FOR PREPARING SAME, AND METHOD FOR FORMING A THIN FILM CONTAINING ANTIMONY USING THE ANTIMONY AMINO ALKOXIDE COMPOUND AND AN ATOMIC LAYER DEPOSITION TECHNIQUE

摘要

The present invention relates to a novel antimony amino alkoxide compound and to a method for preparing a thin film containing antimony using same. The novel antimony amino alkoxide compound according to the present invention may be expressed as Sb[O-A-NR1R2]3, where A is a linear or branched C2-C5 alkylene optionally substituted with a C1-C10 alkyl group; and R1 and R2 are an independent linear or branched C1-C10 alkyl group, respectively. According to the present invention, it is possible to provide an antimony precursor enabling a thin film of superior quality to be prepared.