An apparatus to clean an electronic device may include a head structure having a first surface adapted to face a body to be cleaned, and a plurality of supply openings and return openings. At least a portion of the supply openings and return openings are positioned as alternating rows of supply openings and return openings. The supply openings are larger in area than the return openings in at least a majority of the alternating rows. The supply openings and the return openings are adapted to transmit at least one of a gas and a liquid therethrough. The head structure is adapted to permit the transmission of at least one of a gas and a liquid through the supply openings and at the same time permit the transmission of at least one of a gas and a liquid through the return openings. Other embodiments are described and claimed.
申请公布号
WO2013006494(A2)
申请公布日期
2013.01.10
申请号
WO2012US45118
申请日期
2012.06.29
申请人
INTEL CORPORATION;PARRA-GARCIA, MANUEL;SCHROEDER, CHRISTOPHER R.;AGUILAR-SANTILLAN, JOAQUIN;GARCIA, JEROME L.
发明人
PARRA-GARCIA, MANUEL;AGUILAR-SANTILLAN, JOAQUIN;GARCIA, JEROME L.