METHOD AND APPARATUS FOR POLISHING WITH ABRASIVE CHARGED POLYMER SUBSTRATES

摘要

An abrasive article for polishing a surface of a workpiece. The abrasive article includes a plurality of polishing islands arranged to interact with a workpiece to maintain a substantially constant contact area. Abrasive features are associated with at least some of the plurality of polishing islands. The abrasive features apply cutting forces to the work piece during motion of the abrasive article relative to the workpiece.