发明名称 METHOD AND DEVICE FOR PREVENTING CORROSION ON SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a device for preventing the corrosion of a connecting part and a metalization layer such as a wire bond pad on a sensor, and a manufacturing method thereof. <P>SOLUTION: A device comprises an insulating layer 400 disposed on a metalization layer 300 and an adhering layer 200 disposed on the insulating layer 400. A corrosion resistant layer 100 comprised of gold is disposed on the adhering layer 200. Therefore, while dealing with the use of gold as the corrosion resistant layer 100, a conventional silicon-glass adhering technique can be available. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012247413(A) 申请公布日期 2012.12.13
申请号 JP20120113925 申请日期 2012.05.18
申请人 GENERAL ELECTRIC CO <GE> 发明人 WANG QIANG;KEITH MATTHEW JACKSON;NALESH VENKATA MANTRAVADI
分类号 G01L9/00;G01L19/06;H01L21/316 主分类号 G01L9/00
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