| 摘要 |
The device has a micromechanical sensor unit (120) and /or a passivation agent (160) e.g. gel, surrounding the sensor unit using heating units (200, 210, 220, 230). The heating units are controlled according to a temperature value representing the temperature of the passivation agent. The sensor unit and/or the agent are heated above the temperature of a corrosive environment surrounding the device. An independent claim is also included for a method for controlling and/or adjusting the heating power of a heating unit in a micromechanical device. |
