| 摘要 |
PURPOSE: A plate, a transducer, and a method for manufacturing and operating the transducer are provided to reduce a potential contact area between a back-plate and a driving membrane by forming an extension part on an opening of the back-plate. CONSTITUTION: A microphone(100) is arranged in a bearing substrate(110). The microphone comprises a back- plate(120) and a membrane(130). The back-plate is separated from the membrane with a spacer(140). The space between the membrane and the back-plate is filled with air which does not slow down the movement of the membrane. The back-plate and the membrane comprise electrodes The back-plate comprises a first material layer(122) and a second material layer(124). |
