发明名称 |
Detector for detecting electromagnetic radiation having dopant concentration of a well increases monotonically in the direction parallel to the surface of a semiconductor substrate |
摘要 |
A detector for detecting electromagnetic radiation includes a semiconductor substrate of a first doping type, and a well in the semiconductor substrate, the well being of a second doping type. The first doping type and the second doping type are different and the well has an increasing dopant concentration in a direction parallel to a surface of the semiconductor substrate. In addition, the detector includes a detector terminal doping region which is arranged at least partly in the well in a terminal region of the well. The detection of electromagnetic radiation is based on a generation of free charge carriers by the electromagnetic radiation in a detection region of the well. The detection region has a maximum dopant concentration which is lower than a maximum dopant concentration of the terminal region of the well. |
申请公布号 |
US8324549(B2) |
申请公布日期 |
2012.12.04 |
申请号 |
US20100775204 |
申请日期 |
2010.05.06 |
申请人 |
ROMERO DANIEL DURINI;BROCKHERDE WERNER;HOSTICKA BEDRICH;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
ROMERO DANIEL DURINI;BROCKHERDE WERNER;HOSTICKA BEDRICH |
分类号 |
H01J27/00 |
主分类号 |
H01J27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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