发明名称 |
ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME |
摘要 |
An organic layer deposition apparatus for forming an organic layer on a substrate includes: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; and a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits and at least one spacer arranged between a pair of adjacent patterning slits of the plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and at least one of the substrate or the organic layer deposition apparatus is movable relative to the other. |
申请公布号 |
US2012299023(A1) |
申请公布日期 |
2012.11.29 |
申请号 |
US201213468835 |
申请日期 |
2012.05.10 |
申请人 |
LEE DONG-KYU;KIM MU-HYUN;SONG YOUNG-ROK;LEE SANG-PIL;SONG JUNG-BAE;KIM JONG-HEON;KIM BYUNG-SU;LEE YUN-MI;RYU JAE-KWANG |
发明人 |
LEE DONG-KYU;KIM MU-HYUN;SONG YOUNG-ROK;LEE SANG-PIL;SONG JUNG-BAE;KIM JONG-HEON;KIM BYUNG-SU;LEE YUN-MI;RYU JAE-KWANG |
分类号 |
H01L33/08;B05B1/00;B05C13/00;B05C21/00 |
主分类号 |
H01L33/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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