| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve sensing accuracy of an elastic wave sensor. <P>SOLUTION: A reference part constituted by an elastic boundary wave element for generating a boundary wave that an elastic wave excited by a second IDT electrode 5 propagates a boundary between a piezoelectric substrate 2 and a dielectric film 7 prevents a detection target substance, etc., from sticking on the second IDT electrode 5 constituting the reference part when contacting a substance (expiration, suspension, etc.) with possibility of including the detection target substance to an elastic wave sensor 1. Thereby, since a characteristic change by the deposits is suppressed, sensing accuracy of the reference part constituted by the second IDT electrode 5 can be improved. Consequently, sensing accuracy of the elastic wave sensor 1 is improved. <P>COPYRIGHT: (C)2013,JPO&INPIT |
