YIELD PREDICTION SYSTEM AND YIELD PREDICTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a yield prediction system that predicts a yield with high precision using manufacture data measured through sampling inspection on intermediate products.

SOLUTION: The yield prediction system includes: a manufacture data holding part 62 which holds manufacture data; a quality data holding part 61 which holds quality data; a product standard data holding part 64 which holds standard data; a quality data statistic prediction model construction part 10 which constructs a prediction model for statistics of the quality data by acquiring manufacture data corresponding to the quality data; quality data statistic prediction part 20 which predicts statistics of the quality data based upon manufacture data in manufacture units of an object of yield prediction using the prediction model; a probability distribution estimation part 30 which estimates a probability distribution of the quality data by substituting the statistics of the quality data in a probability distribution function of the quality data; a yield prediction part 40 which obtains a yield by calculating the number of products estimated to meet standards based upon the probability distribution of the quality data and the standard data; and an input/output part which outputs yield data.

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