发明名称 PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME
摘要 A cuboidal protuberant structure is provided. The cuboidal protuberant structure includes a substrate and a protrusion disposed on the substrate. The protrusion has a vertical side wall with a rounded corner, a protuberant width and a protuberant length. At least one of the protuberant width and the protuberant length is not greater than 33 nm.
申请公布号 US2012286402(A1) 申请公布日期 2012.11.15
申请号 US201113105910 申请日期 2011.05.12
申请人 KUO CHIN-TE;CHEN YI-NAN;LIU HSIEN-WEN 发明人 KUO CHIN-TE;CHEN YI-NAN;LIU HSIEN-WEN
分类号 H01L29/06;H01L21/302;H01L23/48 主分类号 H01L29/06
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