发明名称 |
PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME |
摘要 |
A cuboidal protuberant structure is provided. The cuboidal protuberant structure includes a substrate and a protrusion disposed on the substrate. The protrusion has a vertical side wall with a rounded corner, a protuberant width and a protuberant length. At least one of the protuberant width and the protuberant length is not greater than 33 nm.
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申请公布号 |
US2012286402(A1) |
申请公布日期 |
2012.11.15 |
申请号 |
US201113105910 |
申请日期 |
2011.05.12 |
申请人 |
KUO CHIN-TE;CHEN YI-NAN;LIU HSIEN-WEN |
发明人 |
KUO CHIN-TE;CHEN YI-NAN;LIU HSIEN-WEN |
分类号 |
H01L29/06;H01L21/302;H01L23/48 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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