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发明名称
PROCESS FOR PRODUCING DIFFUSION WAFER AND DIFFUSION WAFER
摘要
申请公布号
KR101198356(B1)
申请公布日期
2012.11.08
申请号
KR20090034321
申请日期
2009.04.20
申请人
发明人
分类号
H01L21/02;H01L21/301;H01L21/3063
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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