Semiconductor cell and method for forming the same, cell array, semiconductor device, semiconductor module, semiconductor system, electronic unit and electronic system

摘要

PURPOSE: A semiconductor cell and a forming method thereof, a cell array, a semiconductor device, a semiconductor module, a semiconductor system, an electronic unit, and an electronic system are provided to improve characteristics of the semiconductor device by controlling a coupling effect generated between a bit line and a contact plug. CONSTITUTION: A semiconductor substrate(100) includes a cell region. A storage electrode contact plug(116) is formed on the semiconductor substrate. A bit line(136) is formed between storage electrode contact plugs. An air gap(128) is connected to a bottom sidewall of the bit line. The air gap is extended in a perpendicular direction to a direction that the bit line is extended.