| 摘要 |
PURPOSE: An anti-fuse and a manufacturing method thereof are provided to improve the efficiency of a repair process by controlling the thickness of a sidewall insulation layer formed on the sidewall of a gate electrode to optimize the condition of a repair process. CONSTITUTION: A gate electrode(24) is formed on a substrate(21). A gate insulation layer(23) is formed between the substrate and the gate electrode. A sidewall insulation layer(27) is formed on the sidewall of the gate electrode. A gate(26) buries a part of a recess pattern(22). A drain(29A) and a source(29B) partially overlaps the gate.
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