| 摘要 |
PURPOSE: A coating apparatus is provided to keep a cleaning member clean and to precisely determine the positions of the cleaning member and a slit aperture. CONSTITUTION: A coating apparatus includes a coating part, a driving part, a cleaning member(51), and a cleaning member driving part(53). The coating part includes a nozzle. A slit aperture is formed at the tip end part of the nozzle and discharges liquid toward a substrate. The driving part drives either the substrate or the nozzle in order to relatively move the substrate and the nozzle. The cleaning member is inserted into the slit aperture. The cleaning member driving part moves the cleaning member to the longitudinal direction of the slit aperture. |
