| 摘要 |
A vacuum evacuation device including: a main pump; an auxiliary pump connected in series to the main pump; and an inter-pump piping for interconnecting an outlet of the main pump and an inlet of the auxiliary pump, wherein the main pump includes a mechanical booster pump; a ratio of the maximum power of a motor for the main pump to the maximum pumping rate of the main pump is no less than 5 W/(m 3 /h); the inter-pump piping includes a branch pipe branched from the middle of the inter-pump piping; and a check valve for releasing gas in the inter-pump piping and preventing a back flow of the gas is provided in the middle of the branch pipe. |
