| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily and accurately observe and measure the width of a vibration plate of a droplet discharge head in a process. <P>SOLUTION: This droplet discharge head includes: a passage formation substrate on which a pressure generation chamber communicating with a nozzle hole is formed; a piezoelectric element arranged on one side of the passage formation substrate so as to correspond to the pressure generation chamber through a vibration plate for generating pressure change in the pressure generation chamber by changing flexure of the vibration plate; a protection substrate jointed to the piezoelectric element side while securing a space for preventing the movement of the piezoelectric element from being disturbed; and a vibration plate measuring monitor part which is a space formed at an end of the pressure generation chamber of the passage formation substrate and having a shape similar to the pressure generation chamber, formed with a single- or multi-layer partition plate corresponding to the vibration plate and transparent or translucent for visible light, and formed with a through-hole on the jointed protection substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
