A Linear Deposition Source With Direct Heating,申请号KR20090128272-传众专利搜索

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发明名称	A Linear Deposition Source With Direct Heating
摘要
申请公布号	KR101192525(B1)	申请公布日期	2012.10.17
申请号	KR20090128272	申请日期	2009.12.21
申请人		发明人
分类号	C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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