SUBSTRATE IMPRINT APPARATUS

摘要

PURPOSE: An imprinting apparatus is provided to simply and rapidly fix a stamp by generating magnetic force so that the stamp sticks to a support stand by attractive force in the imprinting operation. CONSTITUTION: A stage(2) is placed inside a chamber case(C). A loading plane(L) is formed at one side of the stage. A stamp(4) comprises an imprint plane(F) corresponding to a substrate(G). A support stand(6) supports the stamp. The support stand supports into plate shape corresponding to the stamp. A magnetic force fixing unit generates magnetic force between the support stand and the stamp. The magnetic force fixing unit comprises a first fixing unit and a second fixing unit. The first fixing unit is arranged on the support stand and comprises a magnet member. The second fixing unit is arranged on the stamp and comprises a magnetic body corresponding to the magnet member.