| 发明名称 |
COATING METHOD AND COATING APPARATUS |
| 摘要 |
A coating method for coating a treatment liquid having a viscosity of 5 cp or less on a substrate includes rotating the substrate, increasing a rotation speed of the substrate while discharging the treatment liquid on the substrate from a nozzle, and repeating at least twice increasing and decreasing the rotation speed of the substrate while discharging the treatment liquid on the substrate from the nozzle. |
| 申请公布号 |
US2012238106(A1) |
申请公布日期 |
2012.09.20 |
| 申请号 |
US201213421321 |
申请日期 |
2012.03.15 |
| 申请人 |
CHUANG CHUNG-BIN;TOKYO ELECTRON LIMITED |
发明人 |
CHUANG CHUNG-BIN |
| 分类号 |
H01L21/30;B05C5/00;B05C21/00 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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