Cleaning apparatus for slit nozzle,申请号KR20110102423-传众专利搜索

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发明名称	Cleaning apparatus for slit nozzle
摘要
申请公布号	KR101184720(B1)	申请公布日期	2012.09.20
申请号	KR20110102423	申请日期	2011.10.07
申请人		发明人
分类号	B05B15/02;B05C5/02;B05C11/10;H01L21/027;H01L21/304	主分类号	B05B15/02
代理机构		代理人
主权项
地址

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