RECYCLING METHOD OF CMP PAD CONDITIONER HAVING END OF LIFE AND RECYCLED CMP PAD CONDITIONER TREATED THEREBY

摘要

PURPOSE: A method for recycling an expired CMP pad conditioner and the recycled CMP pad conditioner by using the method are provided to reduce a production cost by removing a diamond layer remaining in the expired CMP pad conditioner while maintaining patterns formed in a substrate. CONSTITUTION: An expired CMP pad conditioner is collected from CMP pad conditioners. The CMP pad conditioner includes a substrate having plural protrusions and a diamond layer. The diamond layer, remaining on the substrate of the CMP pad conditioner, is removed. The CMP pad conditioner is processed at temperatures of 765°C~1000°C for 30~300minutes to carbonize diamond in the diamond layer. The diamond layer is formed on a whole surface of the substrate.