PLASMA PHOTOGRAPHING SYSTEM BY INTERNAL VACUUM CAMERA

摘要

PURPOSE: A plasma photographing system by a camera in a vacuum state is provided to perform high resolution photography of a specific ion which causes plasma discharge by adding a filter which can transmit only specific waves. CONSTITUTION: A camera(100) includes a lens located on the center The camera includes a channel switch located at a back side, a bracket locking hole, and a power connection part The camera includes an antenna for remote radio control. The camera can be composed of a CCD(Charge-Coupled Device) camera module having high definition. The camera module that can be remotely controlled is installed to a carrier of a deposition substrate. The camera module that can be remotely controlled photographs a plasma discharge shape distributed around a linear target as the substrate is scanned with respect to the linear target.