| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve high-accuracy and high-speed contrast system autofocus. <P>SOLUTION: An image measurement device includes: a camera which images a workpiece and transfers image information thereof; a position control part which controls a focal position of the camera and outputs this focal position as position information in the Z-axis direction; and an image measurement apparatus which performs image measurement of the workpiece based on the image information and the position information. The position control part obtains and holds the position information based on trigger signals outputted from one of the camera and the position control part to the other at a predetermined timing during imaging period the workpiece by the camera. The image measurement apparatus calculates the position information in the Z-axis direction of the image information based on the image information transferred from the camera and the position information outputted from the position control part, and performs autofocus control using the calculated position information. <P>COPYRIGHT: (C)2012,JPO&INPIT |
