PULSE LASER SYSTEM WITH FLEXIBLE BURST MODE OPERATION AND METHOD OF FLEXIBLE BURST MODE OPERATION

摘要

PURPOSE: A pulse laser system and a method of controlling a burst mode and a variable burst mode using the same are provided to not only form output pulses but also change a repetition rate and a pulse length by controlling the output of a laser beam generator. CONSTITUTION: A pulse laser apparatus(100) includes a laser beam generator(110) which generates seed laser signals including pulse signals and stand-by signals and a light amplifier(120) which generates amplified signals by amplifying the seed laser signals. The pulse laser apparatus includes a nonlinear wavelength converter(130) which non-linearly outputs wavelength conversion signals according to the intensity of the amplified signals. The pulse laser apparatus includes an photo-isolator(140) which separates wavelength conversion output pulses from the output of the wavelength converter. The laser beam generator can output both the pulse signals and the stand-by signals. The stand-by signals are generated in an idle period between the pulse signals.