CNT FIELD ELECTRON EMITTER AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A CNT(Carbon Nano-Tube) field emission electron source and a manufacturing method thereof are provided to reinforce adhesive force by forming a patterned CNT film on an electrode substrate. CONSTITUTION: A CNT film(130) is formed on a conductive substrate(110) according to an electrophoresis method. The CNT film is patterned as a predetermined shape on a photo-resist layer laminated on the conductive substrate. The CNT film is combined with a domain of the conductive substrate which is exposed according to patterning. The photo-resist layer is eliminated. A plating layer(140) is formed on a domain in which the photo-resist layer is eliminated according to an electroless plating reaction. The plating layer supports the combination of the CNT film and the conductive substrate.