发明名称 MAGNETIC TUNNEL JUNCTION DEVICE
摘要 The magnetic tunnel junction device of the present invention includes a first ferromagnetic layer, a second ferromagnetic layer, an insulating layer formed between the first ferromagnetic layer and the second ferromagnetic layer. The insulating layer is composed of fluorine-added MgO. The fluorine content in the insulating layer is 0.00487 at. % or more and 0.15080 at. % or less. This device, although it includes a MgO insulating layer, exhibits superior magnetoresistance properties to conventional devices including MgO insulating layers. The fluorine content is preferably 0.00487 at. % or more and 0.05256 at. % or less.
申请公布号 US2012205762(A1) 申请公布日期 2012.08.16
申请号 US201213454696 申请日期 2012.04.24
申请人 MATSUKAWA NOZOMU;ODAGAWA AKIHIRO;MATSUSHITA AKIO;PANASONIC CORPORATION 发明人 MATSUKAWA NOZOMU;ODAGAWA AKIHIRO;MATSUSHITA AKIO
分类号 H01L29/82 主分类号 H01L29/82
代理机构 代理人
主权项
地址