| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning apparatus capable of surely suppressing the deposition of scales generated by electrolysis. <P>SOLUTION: The cleaning apparatus AP has a nozzle 18 discharging functional water to an object, a water feeding channel 12 feeding water fed from a water feeding source to the nozzle 18, and an electrolytic tank 16 arranged in the water feeding channel 12, having a pair of electrodes, and electrolyzing the water fed from the water feeding source to change the property of the same and form the functional water. A Si ion concentration adjusting section 14 raising the Si ion concentration of the water fed from the water feeding source is arranged in an upstream side from the electrolytic tank 16. <P>COPYRIGHT: (C)2012,JPO&INPIT |
