PHASE SHIFTER, COUPLER AND METHODS FOR THEIR PRODUCTION

摘要

A phase shifter, a coupler and methods for their production are provided by the embodiments of the present invention, which relates to the field of photonics, wherein the methods can reduce optical damage, improve the utilization ratio of the light field energy, and improve the response speed of device. The phase shifter comprises: a base silicon layer and an insulated layer covering the base silicon layer; a top silicon layer covering the insulated layer, wherein the top silicon layer includes two isolation grooves, which are separated by a common groove wall with each other, wherein the common groove wall is a waveguide, and the height of the waveguide is higher than the outside groove walls of the two isolation grooves; a first cathode metal layer and a second cathode metal layer covering two outside groove walls of the two isolation grooves respectively; an electro-optic polymer material layer covering the first cathode metal layer,the second cathode metal layer and the top silicon layer; an upper electrode formed on the top of the electro-optic polymer material layer, and the slits formed between the upper electrode and the waveguide and filled by the electro-optic polymer material layer; a second protect layer covering the upper electrode and the electro-optic polymer material layer. The embodiments of the present invention are applied to the electro-optic phase shift.