| 摘要 |
PURPOSE: A film forming apparatus is provided to measure the pressure of a film forming container using a manometer without heat-resisting properties. CONSTITUTION: A supplying apparatus(20) supplies the raw material gas into a film forming container. An exhaust apparatus exhausts gas from the film forming container. A trap unit(30) is placed in the course of an exhaust passage(55) and traps the raw material gas by extracting a product containing the raw material gas. A purge gas supplying unit(50) is connected to join the exhaust passage between the film formation container and the trap unit and supplies purge gas into the exhaust passage. A manometer(51) is installed in a purge gas supplying passage(52).
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