Integrated device for manufacturing chalcopyrite-type thin-film solar cell for photovoltaic-field, has distributor module conveying substrate from one process module into another process module under defined atmospheric conditions

摘要

The device has a substrate-lock (11) for supplying a substrate into the device, and multiple process modules (1-8) for performing necessary process steps for manufacturing a thin-film solar cell. A distributor module (10) conveys the substrate processed in one of the process modules in the other process module such that a transport is carried-out between the process modules and the distributor module under defined atmospheric conditions. The process modules consist of a coating module, a thermal treating module and/or a laser module for patterning process. An independent claim is also included for a method for manufacturing a chalcopyrite-type thin-film solar cell.