| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thickness evaluation method for a carbon thin film by which a thickness of a carbon thin film of diamond-like carbon or the like may be simply evaluated. <P>SOLUTION: A thickness evaluation method for a carbon thin film with a thickness of 100 nm or less formed on a substrate, comprises the steps of: obtaining correlation between a thickness of a carbon thin film and brightness of the carbon thin film measured by a brightness measuring device; measuring, by the brightness measuring device, brightness of a carbon thin film to be evaluated; and evaluating, from the measured brightness of the carbon thin film to be evaluated, a thickness of the carbon thin film to be evaluated on the basis of the correlation precedently obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT |
