METHOD FOR FORMING ELECTRICALLY CONDUCTIVE TRANSPARENT ZINC OXIDE-BASED FILM, ELECTRICALLY CONDUCTIVE TRANSPARENT ZINC OXIDE-BASED FILM, AND ELECRICALLY CONDUCTIVE TRANSPARENT SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an electrically conductive transparent zinc oxide-based film which combines excellent electroconductivity with excellent chemical durability by an ion plating method.

SOLUTION: The method employs an ion plating method to form an electrically conductive transparent zinc oxide-based film and uses a target obtained by processing an oxide sintered compact or an oxide mixture substantially comprising zinc, titanium and oxygen, wherein the atomic ratio Ti/(Zn+Ti) of the titanium to the sum of the zinc and the titanium is greater than 0.02 but does not exceed 0.1.

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