| 摘要 |
The device has a detection unit (26) for recording a set of positionally dependent phase-shifted scanning signals, where partial beams of rays propagating in direction of a scanning unit (20) undergo superposition, and are deflected by a beamsplitter element (22) in a direction of the detection unit, after impinging on a measuring graduation (11). A scanning graduation (24) induces focusing of the rays from the measuring graduation at a reflector element (25) to recollimate the rays propagated in a direction of the measuring graduation, after being reflected at the reflector element. The beam splitter element is a grating beam splitter element. The reflector element is mirror. The detecting unit is an optoelectronic detector. The measuring graduation is a one-dimensional linear graduation. |
