Method Of Reducing Laser-Induced Damage In Forming Laser-Processed Contacts

摘要

A method for manufacturing a photovoltaic cell comprises depositing a passivation layer and a dielectric layer, or a dielectric passivation layer, on at least one surface of a silicon semiconductor wafer; depositing a doping layer on a region of at least one of the surfaces of the wafer; depositing an electrical contact layer comprising a metal over at least the dielectric layer or the dielectric passivation layer in the region containing the doping layer; and spatially and/or temporally pulse-shaping a laser beam directed at the surface of the wafer to form localized base and/or emitter contacts with a greatly reduced amount of laser-induced damage.