| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve inexpensive steam cleaning operation while performing steam cleaning using an expensive HFE (hydrofluoroether) solvent, namely to achieve the inexpensive steam cleaning steam cleaning operation using the HFE solvent by making the consumption of the HFE solvent small and using the HFE solvent repeatedly while performing the steam cleaning using the expensive HFE solvent, and to achieve the inexpensive steam cleaning while using the expensive HFE solvent excellent in environmental performance and cleaning performance. <P>SOLUTION: The upper surface of the HFE solvent 2 is covered with a surface covering liquid 4 formed by a liquid having a lower specific gravity and a higher boiling point than the HFE solvent 2. Cleaning steam generated by heating the HFE solvent 2 is supplied to the upper surface of the surface coating liquid 4 and then condensed and liquefied on an object to be cleaned 5 to perform the steam cleaning of the object to be cleaned 5. <P>COPYRIGHT: (C)2012,JPO&INPIT |
