SUPPORTING ROBOT FOR LARGE SUBSTRATE

摘要

PURPOSE: A large substrate support device is provided to stably support a substrate while transferring and loading a substrate using a four-bar linkage structure. CONSTITUTION: A first arm(101) supports the lower surface of a substrate. One end part of a second arm(102) is combined in a first position of one end part of the first arm in order to be able to rotate. One end part of a third arm(103) is combined in a second position of one end part of the first arm in order to be able to rotate. The other end parts of the second and third arms are combined with a fixed panel(105) in order to be able to rotate.