Wafer-scale x-ray detector and method of manufacturing the same

摘要

A wafer-scale x-ray detector (100) and a method of manufacturing the same are provided. The wafer-scale x-ray detector includes: a seamless silicon substrate (120) electrically connected to a printed circuit substrate (110); a chip array having a plurality of pixel pads (132) formed on a central region thereof and a plurality of pin pads (134) formed at edges thereof on the seamless silicon substrate; a plurality of pixel electrodes (150) formed to correspond to the pixel pads; vertical wirings (142) and horizontal wirings (144) formed to compensate a difference of regions expanded towards the pixel electrodes from the pixel pads between the chip array and the pixel electrodes; a redistribution layer (140) having an insulating layer to separate the vertical wirings and the horizontal wirings; and a photoconductor layer (160) and a common electrode (170) which cover the pixel electrodes on the redistribution layer.