| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a crystal growth device and a crystal growth method capable of preventing warpage of a shower head. <P>SOLUTION: In a crystal growth device 1, a shower head 20 includes a front part 21, a cooling layer 23, and a gas supply layer 25. The front part 21 is opposed to a substrate SUB, and has a plurality of discharge holes emitting raw material gas to the substrate SUB. The cooling layer 23 is laminated on the front part 21, and has a coolant passage, through which a coolant flows. The gas supply layer 25 is laminated on the cooling layer 23, and a buffer space filled with the introduced raw material gas is formed on the gas supply layer 25. The buffer space is communicated with the plural discharge holes via a gas supply pipe penetrating through the cooling layer 23, respectively. A preheater 53 preheats the raw material gas supplied to the gas supply layer 25 during crystal growth. <P>COPYRIGHT: (C)2012,JPO&INPIT |
