| 摘要 |
<p>A method for producing a spectroscopic sensor (1) involves a first step for forming a cavity layer (21) on a handle substrate by means of a nanoimprint method, a second step carried out after the first step and for forming a first mirror layer (22) on the cavity layer (21), a third step carried out after the second step and for bonding a light transmissive substrate (3) to the first mirror layer (22), a fourth step carried out after the third step and for removing the handle substrate from the cavity layer (21), a fifth step carried out after the fourth step and for forming a second mirror layer (23) on the cavity layer (21) from which the handle substrate was removed, and a sixth step carried out after the fifth step and for bonding a light detecting substrate (4) to the second mirror layer (23).</p> |
