发明名称 |
PROBE APPARATUS AND METHOD FOR CORRECTING CONTACT POSITION |
摘要 |
A probe apparatus includes a movable mounting table for supporting an object to be tested; a probe card disposed above the mounting table and having a plurality of probes to come into contact with electrodes of the object; a support body for supporting the probe card; and a control unit for controlling the mounting table. Electrical characteristics of the object are tested based on a signal from a tester by bringing the object and the probes into electrical contact with each other by overdriving the mounting table in a state where a test head is electrically connected with the probe card by a predetermined load. Further, one or more distance measuring devices for measuring a current overdriving amount of the mounting table are provided at one or more locations of the test head or the probe card. |
申请公布号 |
US2012126841(A1) |
申请公布日期 |
2012.05.24 |
申请号 |
US201213358635 |
申请日期 |
2012.01.26 |
申请人 |
YAMADA HIROSHI;ENDO TOMOYA;KOIZUMI SHINYA;TOKYO ELECTRON LIMITED |
发明人 |
YAMADA HIROSHI;ENDO TOMOYA;KOIZUMI SHINYA |
分类号 |
G01R1/02 |
主分类号 |
G01R1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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