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发明名称
SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS
摘要
申请公布号
KR20120051740(A)
申请公布日期
2012.05.22
申请号
KR20127007046
申请日期
2006.02.24
申请人
CYMER, INC.
发明人
BOWERING NORBERT R.;HANSSON BJORN A. M.;BYKANOV ALEXANDER N.;KHODYKIN OLEH;ERSHOV ALEXANDER I.;PARTLO WILLIAM N.
分类号
H05G2/00;H05H1/00
主分类号
H05G2/00
代理机构
代理人
主权项
地址
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