| 摘要 |
<p>PURPOSE: A non-contact transport apparatus of a floating table using a magnet is provided to deliver driving force without contacts by eliminating a driving and transfer media and constructing a rack and pinion system. CONSTITUTION: A magnet guide(111) includes first and second load/evenness correction units. A cross section of the magnet guide includes vertical plates(113a,113b) and a horizontal plate(112). A magnet block(132) is mounted on a floating table(13). The magnet block is inserted to an opening of the magnet guide in a contactless mode. The magnet block includes third and fourth load/evenness correction units.</p> |
