| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor light-emitting element including a semiconductor layer having uniform compositions across a surface of a substrate. <P>SOLUTION: A method for manufacturing a semiconductor light-emitting element includes a step for forming by organic vapor phase epitaxy a laminated structure of a compound semiconductor composed of a group III element and a group V element on a substrate 4 mounted on a substrate mounting part 3 provided on a surface of a tray 1 disposed above heating means, the surface being opposed to a surface facing the heating means. A compound semiconductor film 2 including at least one group III element constituting the laminated structure of the compound semiconductor, and at least one group V element constituting the laminated structure of a compound semiconductor layer, is previously formed on a surface of the substrate mounting part 3 before the laminated structure is formed. The substrate 4 is mounted on the substrate mounting part 3 via the compound semiconductor film 2, and the laminated structure is then formed on the substrate 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
