发明名称 |
PRÄGEVERFAHREN UND VERFAHREN ZUR VERARBEITUNG EINES SUBSTRATS |
摘要 |
An imprint method in which imprinting of a pattern of a mold onto a resin material on a substrate is repeated multiple times. The imprint method includes the steps of preparing the mold including a light blocking member at a position where the pattern is not formed, forming a pattern for the first time by bringing the mold into contact with a photocurable resin material provided on the substrate, forming a first processed area by curing the photocurable resin material by light irradiation, and removing a part of the photocurable resin material extruded from the first processed area into an outside area at a periphery of the first processed area. |
申请公布号 |
AT554050(T) |
申请公布日期 |
2012.05.15 |
申请号 |
AT20080792316T |
申请日期 |
2008.08.01 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OKUSHIMA, SHINGO;SEKI, JUNICHI;ONO, HARUHITO;NAKATSUJI, NAO |
分类号 |
B82Y10/00;G03F7/00 |
主分类号 |
B82Y10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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