CONTINUOUS REMOVE METHOD AND EQUIPMENT OF LED MANUFACTURING PROCESS EXHAUST GAS USING WET-SCRUBBER AND CATALYST REACTION SCRUBBER

摘要

PURPOSE: Method and apparatus for continuously eliminating exhaust gas from a light emitting diode manufacturing process using a wet type scrubber and a catalytic reaction scrubber are provided to collect ammonium sulfate generated by neutralization reaction and to re-sell the ammonium sulfate. CONSTITUTION: A method for continuously eliminating exhaust gas from a light emitting diode manufacturing process includes the following: ammonia is eliminated from exhaust gas using a wet type scrubber; hydrogen is combusted and eliminated from the exhaust gas using a catalytic reaction scrubber. During the ammonia eliminating process, ammonia from the lower tank of the wet type scrubber is reacted with a neutralizing solution. The neutralizing solution is one or more selected from water, deionized water, sulfuric acid, nitric acid, and hydrochloric acid.