| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a creation method of drawing data for drawing a figure pattern on a sample by using a charged particle beam in which the volume of the drawing data can be reduced. <P>SOLUTION: The drawing data is created so that a figure pattern group consisting of multiple figure patterns, each having the same figure type, the same pitch and a size increasing or decreasing at a constant interval, is defined as one array by using one of the end figure size, the dimensional difference from an adjoining figure, and the dimensional difference between a start figure and an end figure, the identifier of figure type, the start figure size, the start figure coordinates, the end figure coordinates, and the number of repetition. <P>COPYRIGHT: (C)2012,JPO&INPIT |
